Comb capacitors
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A doubly decoupled x-axis gyroscope with novel torsional sensing comb capacitors is presented. Both driving and sensing capacitors are dominated by slide film air damping, therefore, it can work even at atmosphere. It adopts asymmetrical comb fingers as sensing capacitors so that it can differentially detect out-of-plane torsional movements.
A doubly decoupled lateral axis micromachined gyroscope
A doubly decoupled x-axis gyroscope with novel torsional sensing comb capacitors is presented. Both driving and sensing capacitors are dominated by slide film air damping, therefore, it can work even at atmosphere. It adopts asymmetrical comb fingers as sensing capacitors so that it can differentially detect out-of-plane torsional movements.
Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe …
To analyze the fringe effects on the capacitance and electrostatic forces of above mentioned capacitors, numerical analysis of some examples and simulation results are given. Figure 4a, c demonstrate C pp /C pp0, F z /F z0, V pi /V pi0 versus d respectively. In Fig. 4a, when d increases with fixed a (b), or a (b) increases with fixed d, the value of C …
Design and Fabrication of a lateral axis Gyroscope with Asymmetric Comb ...
A novel comb capacitor, the fixed and movable fingers of which have different positions but the same height, is proposed. The comb capacitor can be used to measure out-of-plane movement through differential method and has low air damping. Using this kind of comb capacitor, a bulk micromachined y-axis gyroscope is designed, whose structure is doubly …
Calculating capacitance and analyzing nonlinearity of micro ...
2.1 Dividing comb-capacitor into identical units. Generally, a micro-accelerometer consists of four identical comb-capacitors that produce a differential capacitance. A schematic diagram of a comb-capacitor is shown in Fig. 2 cause the overlapping length L of finger is much larger than its thickness t and width W, the finger …
Study of Capacitance in Electrostatic Comb-Drive Actuators
Capacitor is mainly defined as two conducting plates that can hold the opposite charges on it. These plates can be used either as a sensor or an actuator. If the relative distance between the two conductors changes as result of given input, then capacitance values will change. This results in basic of capacitive or electrostatic sensing ...
Analysis of Fringe Effect of MEMS Comb Capacitor with Slot …
For a super high precision MEMS sensor with the comb capacitor structure, the fringe effect of capacitors can not be neglected. In this paper, directing at the comb capacitor structure with slot holes, the effects of the non-overlap parts of comb capacitor, the distance between two slot holes in comb electrodes and slot depth aspect ratio on …
An alternative capacitive transducer design for sensitivity …
The magnetometer is an essential component in a number of scientific and technical disciplines, including instrumentation and space navigation. To detect magnetic fields, a traditional Lorentz force capacitive magnetometer utilizes transverse, parallel-plate combs. Due to the substantial squeeze-film damping effects, increasing the number of …
Comb Capacitor Structures for On-Chip Physical Uncloneable Function
AB - Planar inter-digitated comb capacitor structures are an excellent tool for on-chip capacitance measurement and evaluation of properties of coating layers with varying composition. These comb structures are easily fabricated in a single step in the last metallization layer of a standard IC process.
Comb Capacitor Structures for On-Chip Physical Uncloneable …
96 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 22, NO. 1, FEBRUARY 2009 Comb Capacitor Structures for On-Chip Physical Uncloneable Function Deepu Roy, Johan H. Klootwijk, Senior Member, IEEE, Nynke A. M. Verhaegh, Harold H. A. J. Roosen, and Rob A. M. Wolters Abstract—Planar inter-digitated comb capacitor …
Analytical Model for Comb-Capacitance Fringe Fields
Analytical Model for Comb-Capacitance Fringe Fields. Abstract: Analytical expressions for electric potential and electric fringe fields in regions above the fingers of …
Design and Optimization of Metal-Metal Comb-Capacitors
This paper describes the design and modeling of metal-metal comb-capacitors (MMCC) for RF and analog applications. An optimum MMCC topology is found for. a 0.25μ process …
Comb Capacitor Structures for On-Chip Physical …
Planar inter-digitated comb capacitor structures are an excellent tool for on-chip capacitance measurement and evaluation of properties of coating layers with varying composition.
Decoupled Comb Capacitors for Microelectromechanical …
comb capacitor and TFG is the same as the torsional sensing comb capacitor reported in our previous work [11]. Although this process needs two more masks than the z-axis gyroscope
Analysis of a comb filter using synchronously commutated capacitors ...
THE possibility of constructing a comb filter by commutating the input signal to a bank of capacitors through a series resistor has been suggested in the literature.1 A theoretical investigation of the properties of such a filter is given in the following analysis.
Characterization of MEMS comb capacitor
With the advancement of micro-electro-mechanical systems (MEMS) technologies, it is compulsory to have the sources which power the micro devices at micron scale. Due to the miniaturization, compactness, inexpensive and ease of integration with the standard process compatibility, CMOS-MEMS capacitor is characterized. There are two …
Comb Capacitor Structures for On-Chip Physical ...
Planar inter-digitated comb capacitor structures are an excellent tool for on-chip capacitance measurement and evaluation of properties of coating layers with varying composition. These comb structures are easily fabricated in a single step in the last metallization layer of a standard IC process. Capacitive coupling of these structures with …
Vertical comb-finger capacitive actuation and sensing for CMOS …
A new method for out-of-plane (vertical) electrostatic actuation and capacitive displacement-sensing that utilizes sidewall capacitance change of …
A Review of Actuation and Sensing Mechanisms in MEMS-Based …
A Review of Actuation and Sensing Mechanisms in MEMS- ...
Analytical design of MEMS variable capacitors based on shaped-finger comb …
A variable capacitor is one of the widely used components in radio frequency (RF) circuits. Variable capacitors can benefit from the microelectromechanical systems (MEMS) technology, to be equipped with attractive characteristics such as high quality factor and wide tuning range. One of the design goals for MEMS varactors has …
RF MEMS electrostatically actuated tunable capacitors and their …
The vertical comb drive tunable capacitor creates a large offset in comb fingers by small rotation of actuator''s angle. A high tuning ratio of more than 31:1, and …
High quality factor RF MEMS tunable capacitor | Microsystem …
This paper presents the design of a tunable capacitor that integrates two vertical comb-drive tunable capacitors and a parallel plate tunable capacitor. The parallel plate tunable capacitor is in the middle of the comb-drive tunable capacitors. The vertical comb-drive part has sets of fixed and moving fingers while the parallel plate has fixed …
Characterization of MEMS comb capacitor | Microsystem …
In this research article, the characterization of MEMS comb capacitor is done that was fabricated under 0.35 µm CMOS technology (Dennis et al. 2016) with high …
A Scalable Model of Shielded Capacitors Using Mirror Image Effects
A new metal-metal capacitor with a small parasitic inductance, named a bending-comb capacitor (BCC), is proposed based on a standard digital CMOS technology. The BCC is applicable to high ...
Decoupled Comb Capacitors for Microelectromechanical Tuning …
This letter presents a novel comb capacitor which can decouple the mechanical crosstalk between the sensing and driving modes of gyroscopes. The capacitance and electrostatic force of the comb capacitor are simulated and analyzed to verify the decoupling principle. A lateral-axis tuning-fork gyroscope is used successfully to demonstrate the decoupling …
Comb Drive Actuator
comb drive capacitance is C (x, y) = 1.51 pF. Fig. 3. Comparison of the electromechanical finite element simulation (CosolveEM) with the created three-port model (Spectre). 2.3 Dynamic modeling Assuming the displacements x and y are independent ...
Design and simulation of a wide-range variable MEMS capacitor …
The only capacitor in this structure is the parallel plate capacitor with a fringing field. This capacitor is the same as the capacitor extracted from Eq. 23. The simulated fringing field capacitance of the variable capacitor is %19C p(min) and %2.5C p(max), where C P(min) and C P(max) are the minimum and maximum parallel plate …
Characterization of MEMS comb capacitor
The pad connections of MEMS comb capacitor are shown in Fig. 4, where pad number 9 connected with the upper stator part, pad number 3 connected with the lower stator part of the comb capacitor and shuttle connected with pin 10 and 6. The pad number 9 of the MEMS comb capacitor is connected with pin 9 of the DIP package and pad number
Vertical comb-finger capacitive actuation and sensing for CMOS …
3.. Out-of-plane comb-finger actuation and sensingAs shown in Fig. 1, microstructures can have several embedded metal layers, which is a major difference from homogeneous polysilicon counterparts.These multiconductor layer structures make it possible to construct multiple capacitors between comb fingers.
Improvement in Leakage Current and Breakdown Field of Cu-Comb Capacitor ...
The Cu-MIS and Cu-comb capacitors with an α-SiCO dielectric barrier exhibit a leakage current at least three orders of magnitude smaller than those with an amorphous silicon carbide (α-SiC, dielectric barrier at an applied electric field of 1.6 MV/cm between 25 and 250°C. Moreover, the breakdown field of the Cu-MIS and Cu-comb …
(PDF) Decoupled Comb Capacitors for Microelectromechanical Tuning-Fork ...
The novel driving comb capacitors are used to suppress the parasitic out-of-plane electrostatic force and, hence, can decouple the mechanical crosstalk from the sensing mode to the driving mode in ...
Chapter 5
The capacitor is a device for storing electrical energy and is required for tuned resonators, D.C. blocks and various charge storing circuits. In millimeter-wave CMOS circuits, …
Comb Capacitor Structures for On-Chip Physical Uncloneable …
Planar inter-digitated comb capacitor structures are an excellent tool for on-chip capacitance measurement and evaluation of properties of coating layers with …
Basic MEMS Actuators
Comb capacitor drives typically have hundreds to thousands of combs to generate a desired force. For analysis purposes, Fig. 3 shows one unit of a comb drive. When …
Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe …
Many micro-electro-mechanical systems sensors and actuators adopted electrostatically driving structures, whose electrostatic forces or driving voltages should be considered and evaluated based on calculating the capacitance and electrostatic forces of the structures, such as parallel plate capacitors, plate combs and sector combs. …
Design, modelling and characterization of comb drive MEMS gap …
This paper presents design optimization, numerical modelling, fabrication and characterization of a single-axis comb drive MEMS gap-changeable differential …
A silicon-on-glass Z-axis accelerometer with vertical sensing comb ...
A Z-axis accelerometer with asymmetrical vertical sensing comb capacitors and high aspect ratio single crystal mechanical structures is presented and shows a cross-axis sensitivity of 0.46% with specially designed out-of-plane springs. A Z-axis accelerometer with asymmetrical vertical sensing comb capacitors and high aspect ratio single crystal …
A new MEMS based variable capacitor using electrostatic vertical comb ...
We have proposed a new wide tunable MEMS variable capacitor. In the proposed structure, an electrostatic vertical comb drive actuator is used to extend the tuning range. Moreover, the auxiliary cantilever-beams are used in the electrostatic comb drive actuator to delay the front sticking (Pull in) and increase the tunability. The effect of lateral …
Analysis of Fringe Effect of MEMS Comb Capacitor with Slot …
For a super high precision MEMS sensor with the comb capacitor structure, the fringe effect of capacitors can not be neglected. In this paper, directing at the comb capacitor structure with slot holes, the effects of the non-overlap parts of comb capacitor, the distance between two slot holes in comb electrodes and slot depth aspect …
Comb capacitive sensor implemented in 1um MEMS process. Left ...
Each sensor is composed of a pair of COMB capacitors implemented in modified MEMS technology (SEM micrograph is shown on the right side of Fig. 1); the fingers are not released from the bottom ...